Development of an atomic force microscope semiconductor metrology system
Development of an atomic force microscope semiconductor metrology system
Project
ICSPI is pioneering a breakthrough inspection tool for semiconductor manufacturing that uses unique miniaturized atomic force microscope (microAFM) technology to detect tiny defects at speeds 100x faster than the state-of-the-art tools. Faster defect inspection is crucial, as a single 1 nanometre defect — the same size as DNA — can cause a chip to fail. By speeding up defect detection, ICSPI’s tool can enable new chip-making processes, accelerate time-to-market of new products, reduce waste and boost the supply of chips.
"icspi’s unique microAFM technology will revolutionize leading-edge chipmaking on a global scale, and ensure that a Canadian company and homegrown technology are at the forefront of semiconductor manufacturing. "
— ICSPI
ICSPI
ICSPI designs and manufactures revolutionary atom-level measurement tools called atomic force microscopes, using unique, patented microAFM technology. ICSPI’s desktop AFM systems have reset the expectations for atom-scale imaging and are used by researchers and engineers in over 40 countries for R&D and quality control. icspi is also developing next-generation measurement solutions for the semiconductor industry using its parallel microAFM technology. icspi is headquartered in Kitchener-Waterloo, Ontario.
Project Metrics
"FABrIC accelerates the timeline to commercialize our product by enabling us to hire more engineers and invest in critical prototyping equipment. With FABrIC’s support we expect to shorten our development timeline and engage with customers and validate our solution earlier."
— ICSPI
ICSPI
Development of an atomic force microscope semiconductor metrology system
Targeted Industry/ies:
Advanced Manufacturing
Product Development
Round 1
Ontario, Waterloo
$623,000
