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Introduction to IntelliSuite
Overview of IntelliSuite as a comprehensive MEMS simulation tool.
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2D Layout Design and 3D Modeling
Creating 2D layouts and converting them into detailed 3D models.
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Import/Export of GDSII/DXF Files
Efficient handling of design files with Design Rule Check (DRC) functionality.
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3D CAD Model Integration
Importing and exporting 3D CAD models seamlessly into IntelliSuite.
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Thermal, Electrical, and Mechanical MEMS Modeling
Demonstration of finite element (FEM/FEA, BEM) simulations for thermal, electrical, and mechanical and coupled physics simulation.
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Reduced Order Modeling (ROM)
Performing ROM simulations and integrating them with electronic design automation (EDA) tools.
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MEMS Device Process Recipe Definition
Creating and simulating standalone MEMS device process recipes (e.g., diffusion-based deposition, ion beam lithography, greyscale lithography).
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Bulk Micromachining Simulation (Wet/Dry)
- Simulation of materials such as Silicon (Si), Quartz (Qz), Aluminum Oxide (Al₂O₃), Indium Phosphide (InP), Gallium Arsenide (GaAs), and Aluminum Gallium Arsenide (AlGaAs).
- High-index plane etching over a user-defined plane orientation.
- Etch rates are based on experimental data and user-defined etch rates.
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MEMS Process Design Kits (PDK) Templates
Utilizing process templates and exploring PDKs, including MEMSCAP, GE Polaris Process, and Through-Silicon Via (TSV) technology.
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Case Studies
Real-world MEMS design examples, including Optical Switches, Pressure Sensors, and Piezoelectric-based devices.