MEMS Design and Simulation Using IntelliSuite Training Course Outline

  • Introduction to IntelliSuite

    Overview of IntelliSuite as a comprehensive MEMS simulation tool.

  • 2D Layout Design and 3D Modeling

    Creating 2D layouts and converting them into detailed 3D models.

  • Import/Export of GDSII/DXF Files

    Efficient handling of design files with Design Rule Check (DRC) functionality.

  • 3D CAD Model Integration

    Importing and exporting 3D CAD models seamlessly into IntelliSuite.

  • Thermal, Electrical, and Mechanical MEMS Modeling

    Demonstration of finite element (FEM/FEA, BEM) simulations for thermal, electrical, and mechanical and coupled physics simulation.

  • Reduced Order Modeling (ROM)

    Performing ROM simulations and integrating them with electronic design automation (EDA) tools.

  • MEMS Device Process Recipe Definition

    Creating and simulating standalone MEMS device process recipes (e.g., diffusion-based deposition, ion beam lithography, greyscale lithography).

  • Bulk Micromachining Simulation (Wet/Dry)

    • Simulation of materials such as Silicon (Si), Quartz (Qz), Aluminum Oxide (Al₂O₃), Indium Phosphide (InP), Gallium Arsenide (GaAs), and Aluminum Gallium Arsenide (AlGaAs).
    • High-index plane etching over a user-defined plane orientation.
    • Etch rates are based on experimental data and user-defined etch rates.

  • MEMS Process Design Kits (PDK) Templates

    Utilizing process templates and exploring PDKs, including MEMSCAP, GE Polaris Process, and Through-Silicon Via (TSV) technology.

  • Case Studies

    Real-world MEMS design examples, including Optical Switches, Pressure Sensors, and Piezoelectric-based devices.

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