Training: MEMS Design and Simulation Using IntelliSuite

Supported by

FABrIC—funded by the Government of Canada and managed by CMC Microsystems—supports training and reskilling courses designed to equip industry and academia with the skills needed to strengthen the semiconductor industry in Canada.

CMC Microsystems is excited to announce a comprehensive online training program on MEMS design and simulation using IntelliSuite, presented by Dr. Sripada Raja from IntelliSense. IntelliSuite is a robust software package offering end-to-end solutions for MEMS simulation, covering Multi-Physics Analysis, Microfabrication Process Simulation, and System Integration workflows.

Join us for this engaging and informative training program and elevate your MEMS design and simulation skills with IntelliSuite!

What to Expect

Dr. Raja will demonstrate IntelliSuite’s advanced simulation capabilities, emphasizing practical solutions to complex challenges in MEMS design. The training will cover:

  • Multiphysics Challenges: Addressing coupled physical phenomena such as thermal, mechanical, fluidic, and electrical interactions critical to MEMS performance.
  • Microfabrication Process Simulations: Simulating the entire fabrication workflow to predict and mitigate potential issues before production, ensuring design accuracy and efficiency.
  • System-Level Integration Techniques: Integrating MEMS devices seamlessly into larger systems, focusing on optimizing performance, reliability, and scalability.

For more details, refer to the course outline.

Access and Feedback Opportunity

CMC subscribers will be provided access to IntelliSuite software for a fixed duration trial period following the training. This trial period access is provided to help the users gain hands-on experience with the tool, evaluate its features, and tailor its use to their specific requirements. We encourage CMC subscribers to make the most of the software during the trial period. During this period, user feedback will play a crucial role in evaluating the software’s suitability for widespread adoption by CMC. Your active participation in both the training and the trial period will be highly valued, as it will help CMC identify the best MEMS CAD tools for its subscribers.

Training Details and Program

Event: Online Training on MEMS Design and Simulation with IntelliSuite
Duration: Three half-day sessions
Hosted by: CMC Microsystems

Day Date Time (EST) Content
1 Wednesday, February 12, 2025 4 hours:
12:00 pm – 4:00 pm
  • Overview of MEMS CAD tool capabilities
  • 2D Layout Design and conversion to 3D Model
  • Introduction to Multiphysics simulation for MEMS devices
  • MEMS device simulations (including piezoresistive and piezoelectric)
2 Thursday,
February 13, 2025
4 hours:
12:00 pm – 4:00 pm
  • Introduction to Microfabrication tool capabilities
  • Import/Export of GDSII and DXF files
  • Standalone process and MEMS device process recipe simulations
  • Exploring MEMS Process Design Kits (PDKs): MEMSCAP, GE Polaris Process, and TSV
  • Bulk Micromachining simulation (Si, Quartz, Al2O3, InP, GaAs, AlGaAs)
  • High Index plane etching over a user-defined plane orientation.
  • Etch rates based on experimental data and user defined etch rates.
3 Friday,
February 14, 2025
2 hours:
12:00 pm – 2:00 pm
  • Introduction to Macro-model simulation
  • Linking with other EDA tools
Price and Registration

The registration is closed.

Contact

Qader Qureshi

Manager, MNI

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