Training: MEMS Design and Simulation Using IntelliSuite

CMC Microsystems is excited to announce a comprehensive online training program on MEMS design and simulation using IntelliSuite, presented by Dr. Sripada Raja from IntelliSense. IntelliSuite is a robust software package offering end-to-end solutions for MEMS simulation, covering Multi-Physics Analysis, Microfabrication Process Simulation, and System Integration workflows.

Join us for this engaging and informative training program and elevate your MEMS design and simulation skills with IntelliSuite!

What to Expect

Dr. Raja will demonstrate IntelliSuite’s advanced simulation capabilities, emphasizing practical solutions to complex challenges in MEMS design. The training will cover:

  • Multiphysics Challenges: Addressing coupled physical phenomena such as thermal, mechanical, fluidic, and electrical interactions critical to MEMS performance.
  • Microfabrication Process Simulations: Simulating the entire fabrication workflow to predict and mitigate potential issues before production, ensuring design accuracy and efficiency.
  • System-Level Integration Techniques: Integrating MEMS devices seamlessly into larger systems, focusing on optimizing performance, reliability, and scalability.

For more details, refer to the course outline.

Training Outline

The session will showcase and provide a step-by-step approach to leveraging IntelliSuite for comprehensive MEMS design and simulation. Key topics include:
  1. Introduction to IntelliSuite: Overview of IntelliSuite as a comprehensive MEMS simulation tool.
  2. 2D Layout Design and 3D Modeling: Creating 2D layouts and converting them into detailed 3D models.
  3. Import/Export of GDSII/DXF Files: Efficient handling of design files with Design Rule Check (DRC) functionality.
  4. 3D CAD Model Integration: Importing and exporting 3D CAD models seamlessly into IntelliSuite.
  5. Thermal, Electrical, and Mechanical MEMS Modeling: Demonstration of finite element (FEM/FEA, BEM) simulations for thermal, electrical, and mechanical and coupled physics simulation.
  6. Reduced Order Modeling (ROM): Performing ROM simulations and integrating them with electronic design automation (EDA) tools.
  7. MEMS Device Process Recipe Definition: Creating and simulating standalone MEMS device process recipes (e.g., diffusion-based deposition, ion beam lithography, greyscale lithography).
  8. Bulk Micromachining Simulation (Wet/Dry):
    • Simulation of materials such as Silicon (Si), Quartz (Qz), Aluminum Oxide (Al₂O₃), Indium Phosphide (InP), Gallium Arsenide (GaAs), and Aluminum Gallium Arsenide (AlGaAs).
    • High-index plane etching over a user-defined plane orientation.
    • Etch rates are based on experimental data and user-defined etch rates.
  9. MEMS Process Design Kits (PDK) Templates: Utilizing process templates and exploring PDKs, including MEMSCAP, GE Polaris Process, and Through-Silicon Via (TSV) technology.
  10. Case Studies: Real-world MEMS design examples, including Optical Switches, Pressure Sensors, and Piezoelectric-based devices.

Access and Feedback Opportunity

CMC subscribers will be provided access to IntelliSuite software for a fixed duration trial period following the training. This trial period access is provided to help the users gain hands-on experience with the tool, evaluate its features, and tailor its use to their specific requirements. We encourage CMC subscribers to make the most of the software during the trial period. During this period, user feedback will play a crucial role in evaluating the software’s suitability for widespread adoption by CMC. Your active participation in both the training and the trial period will be highly valued, as it will help CMC identify the best MEMS CAD tools for its subscribers.

Training Details and Program

Event: Online Training on MEMS Design and Simulation with IntelliSuite
Duration: Three half-day sessions
Hosted by: CMC Microsystems

Day Date Time (EST) Content
1 Wednesday, February 12, 2025 4 hours:
12:00 pm – 4:00 pm
  • Overview of MEMS CAD tool capabilities
  • 2D Layout Design and conversion to 3D Model
  • Introduction to Multiphysics simulation for MEMS devices
  • MEMS device simulations (including piezoresistive and piezoelectric)
2 Thursday,
February 13, 2025
4 hours:
12:00 pm – 4:00 pm
  • Introduction to Microfabrication tool capabilities
  • Import/Export of GDSII and DXF files
  • Standalone process and MEMS device process recipe simulations
  • Exploring MEMS Process Design Kits (PDKs): MEMSCAP, GE Polaris Process, and TSV
  • Bulk Micromachining simulation (Si, Quartz, Al2O3, InP, GaAs, AlGaAs)
  • High Index plane etching over a user-defined plane orientation.
  • Etch rates based on experimental data and user defined etch rates.
3 Friday,
February 14, 2025
2 hours:
12:00 pm – 2:00 pm
  • Introduction to Macro-model simulation
  • Linking with other EDA tools
Price and Registration

The registration is free.

Contact

Qader Qureshi

Manager, MNI

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