Silicon photonics enables scalable active devices, but optical loss, absorption and limited wavelength coverage constrain its use in ultra-low-loss, broadband passive circuits.

To overcome this challenge, Edmonton-based Applied Nanotools Inc. is developing a monolithic photonic integrated circuit platform that combines active silicon (Si) devices with passive silicon nitride (SiN) circuits on a single chip. Applied Nanotools will establish a Canadian fabrication process for applications including quantum photonics, integrated LiDAR, sensing, astrophotonics, data communications, and telecommunications.

Silicon provides compact active functions, including high-performance phase shifters, while SiN supports ultra-low-loss, high-power routing over a broad spectral range. Applied Nanotools’ platform will integrate the two materials at wafer level to enable more complex photonic systems without the challenges that come with assembling separate chips.

Applied Nanotools will optimize Si-SiN waveguide patterning, etching and planarization; improve low-loss SiN film deposition; and develop reliable interlayer couplers that transfer light efficiently between the Si and SiN layers. Applied Nanotools will design, fabricate and validate photonic building blocks and deliver a Process Design Kit (PDK) that will provide compact models and layout-ready components.

Fabrication will be done at the University of Alberta nanoFAB and the University of British Columbia SBQMI open-access cleanroom facilities. McMaster University and the National Research Council of Canada will support design work, as well as testing of thin-films and circuit components. The project will progress from TRL 4 to TRL 8, with anticipated commercial process specifications and validated PDK components available at completion.