The project aims to leverage newly emerging fabrication technologies to design advanced MEMS thermal sensors for measuring pressure, flow and gas properties. The sensors will address growing market demand for better performance, enhanced reliability and significant cost reduction. Key fabrication processes include: Building of highly sensitive, low noise and stable micro heaters and sensing elements from nanoscale thin metal films; Novel etching process combining anisotropic and isotropic dry etching to release suspended microstructures; Polymer-based wafer bonding to assemble micro-flow channels between bonded wafers followed by film-assisted plastic molding. The sensors will be validated in real-world operational environments.